Lab-Based Unit Operations in Microelectronics Processing
Chih-hung (Alex) Chang, Milo D. Koretsky, Sho Kimura, Skip Rochefort, Cyndie Shaner

Summer School Poster Session Paper
The chemical engineering department at Oregon State University is committed to developing strength in microelectronics processing. To this end, we are developing curricular and experimental modules from selected unit operations common in the microelectronics industry and are integrating these into the classroom and the laboratory. The curricular modules are intended to reinforce core ChE fundamentals with examples from microelectronics processing. The lab modules provide students with hands-on learning in this are as well as more open-ended problem-solving experiences.